Structuration of the Low Temperature Co-fired Ceramics (ltcc) Using Novel Sacrificial Graphite Paste with Pva-propylene Glycol-glycerol-water Vehicle Structuration of the Low Temperature Co-fired Ceramics (ltcc) Using Novel Sacrificial Graphite Paste with Pva-propylene Glycol-glycerol-water Vehicle
نویسندگان
چکیده
A novel formulation for thick-film graphite sacrificial pastes is studied in this paper. It is composed of coarse graphite powder (grain size: 25 μm), dispersed in a vehicle consisting of polyvinyl alcohol (PVA) dissolved in a propylene glycol (PG) – glycerol (G) – water mix, which is not aggressive to thin LTCC sheets. The presented sacrificial paste has been successfully applied for fabrication of thin (< 50 μm) membranes and microchannels in LTCC (Low Temperature Co-fired Ceramics) substrate. The properties of the graphite-based paste have been examined using thermo-gravimetric analysis (TGA), differential thermogravimetric (DTA) and differential thermal analysis (DTA). The obtained membranes and microchannels have been investigated using scanning electron microscopy (SEM), energy dispersive x-ray analysis (EDX) and optical profile measurements gauge. Key words: sacrificial volume material (SVM), polyvinyl alcohol-propylene glycol-glycerolwater vehicle, LTCC, membrane, channel 2010-‐10-‐21 3/17
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